Browsing by author "Van Schoot, Jan"
Now showing items 1-5 of 5
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Alternative EUV mask technology for mask 3D effect compensation
Van Look, Lieve; Philipsen, Vicky; Hendrickx, Eric; Vandenberghe, Geert; Knops, Roel; Davydova, Natalia; Wittebrood, Friso; De Kruif, Robert; Van Oosten, Anton; Fliervoet, Timon; Van Schoot, Jan; Neumann, Jens Timo (2014) -
Alternative EUV mask technology to compensate for mask 3D effects
Van Look, Lieve; Philipsen, Vicky; Hendrickx, Eric; Vandenberghe, Geert; Davydova, Natalia; Wittebrood, Friso; De Kruif, Robert; Van Oosten, Anton; Miyazaki, Junji; Fliervoet, Timon; Van Schoot, Jan; Neumann, Jens Timo (2015) -
Driving the industry towards a consensus on high numerical aperture (High-NA) extreme ultraviolet (EUV)
Kearney, Patrick; Wood, Obert; Hendrickx, Eric; McIntyre, Greg; Soichi, Inoue; Goodwin, Frank; Wurm, Stephan; Van Schoot, Jan; Kaiser, Winfried (2014) -
Experimental validation of novel EUV mask technology to reduce mask 3D effects
Van Look, Lieve; Philipsen, Vicky; Hendrickx, Eric; Davydova, Natalia; Wittebrood, Friso; De Kruif, Robert; Van Oosten, Anton; Miyazaki, Junji; Fliervoet, Timon; Van Schoot, Jan; Neumann, Jens Timo (2015) -
Experimental validation of novel mask technology to reduce mask 3D effects
Van Look, Lieve; Philipsen, Vicky; Hendrickx, Eric; Davydova, Natalia; Wittebrood, Friso; De Kruif, Robert; Van Oosten, Anton; Miyazaki, Junji; Fliervoet, Timon; Van Schoot, Jan; Neumann, Jens Timo (2015)