Browsing by author "Loyo Prado, Jana"
Now showing items 1-9 of 9
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Detailed characterization of the effects of plasma treatments on an advanced 2.0 low-k material
Verdonck, Patrick; Maheshwari, Abhishek; Swerts, Johan; Tielens, Hilde; Franquet, Alexis; Loyo Prado, Jana; Armini, Silvia; Baklanov, Mikhaïl; Van Elshocht, Sven; Uedono, Akira; Roque Huanca, Danilo; Gomes dos Santos Filho, Sebastiao; Kellerman, Guinther (2013) -
Electrical properties of amino SAM layers studied with conductive AFM
Chintala, Ravi Chandra; Eyben, Pierre; Armini, Silvia; Maestre Caro, Arantxa; Loyo Prado, Jana; Sun, Yiting; Vandervorst, Wilfried (2013) -
Pore sealing of k 2.0 dielectrics assisted by self-assembled monolayers deposited from vapor phase
Armini, Silvia; Loyo Prado, Jana; Krishtab, Mikhail; Swerts, Johan; Verdonck, Patrick; Meersschaut, Johan; Conard, Thierry; Blauw, Michiel; Struyf, Herbert; Baklanov, Mikhaïl (2014) -
Pore sealing of porous low-k films by SAMs for ALD
Armini, Silvia; Verdonck, Patrick; Loyo Prado, Jana; Krishtab, Mikhail; Swerts, Johan; Ciofi, Ivan; Meerschaut, Johan; Kim, Tae-Gon; Adelmann, Christoph; Le Quoc, Toan; Van Elshocht, Sven; Delabie, Annelies; Leunissen, Peter; Baklanov, Mikhaïl (2011) -
Pore sealing of porous ultralow-k dielectrics by self-assembled monolayers combined with atomic layer deposition
Armini, Silvia; Loyo Prado, Jana; Swerts, Johan; Sun, Yiting; Krishtab, Mikhail; Meersschaut, Johan; Blauw, Michiel; Baklanov, Mikhaïl; Verdonck, Patrick (2012) -
Self-assembled monolayers assisted pore sealing of k 2.0 dielectrics
Armini, Silvia; Sun, Yiting; Loyo Prado, Jana; Baumans, Kim; De Cooman, Johan; Redzheb, Murad; Verdonck, Patrick; Swerts, Johan; Baklanov, Mikhaïl; Struyf, Herbert (2013) -
Silicon nanowires for advanced sensing: Electrical and electromechanical characteristics and functionalisation technology
Mizuta, Hiroshi; Hassani, Fadeh; Tsuchiya, Yoshi; Ghiass, M. Adel; Armini, Silvia; Delande, Tinne; Loyo Prado, Jana; Cherman, Vladimir; Dupre, Cecilia; Ollier, Eric (2011) -
Study of SiGe cleaning
Komori, Kana; Wostyn, Kurt; Rondas, Dirk; Loyo Prado, Jana; Conard, Thierry; Loo, Roger; Ragnarsson, Lars-Ake; Horiguchi, Naoto; Holsteyns, Frank (2017) -
Study of wet surface activation routes to enable the deposition of monomolecular organic thin films on k2.0 porous dielectrics
Armini, Silvia; Loyo Prado, Jana; Krishtab, Mikhail; Conard, Thierry; Meersschaut, Johan; Le, Quoc Toan; Verdonck, Patrick; Baklanov, Mikhaïl (2014)