Browsing by author "Hens, S."

Chemical and structural analysis of etching residue layers in semiconductor devices with energy filtering transmission electron microscopy

Hens, S.; Van Landuyt, J.; Bender, Hugo; Boullart, Werner; Vanhaelemeersch, Serge (2001)

Chemical and structural analysis of etching rsidue layers in semiconductor devices with energy filtering transmission electron spectroscopy

Hens, S.; Van Landuyt, J.; Bender, Hugo; Boullaert, W.; Vanhaelemeersch, Serge (2000)

EFTEM analysis of the interaction of CO with a fluorinated organic dielectric

Hens, S.; Van Landuyt, J.; Bender, Hugo; Lanckmans, Filip; Maex, Karen (2000)

EFTEM as a porosity metrology tool for low-k dielectrics

Hens, S.; Bender, Hugo; Van Landuyt, J.; Iacopi, Francesca; Weidner, K.; Maex, Karen (2002)

EFTEM study of plasma etched low-k Si-O-C dielectrics

Hens, S.; Bender, Hugo; Donaton, R. A.; Maex, Karen; Vanhaelemeersch, Serge; Van Landuyt, J. (2001)

Grown-in lattice defects and diffusion in czochralski-grown germanium

Vanhellemont, J.; De Gryse, O.; Hens, S.; Vanmeerbeek, P.; Poelman, D.; Clauws, P.; Simoen, Eddy; Claeys, Cor; Romandic, I.; Theuwis, A.; Raskin, G.; Vercammen, H.; Mijlemans, P. (2004)

Quantitative EFTEM study of germanium quantum dots

Hens, S.; Stuer, Cindy; Bender, Hugo; Loo, Roger; Van Landuyt, J. (2001)

Reliability of copper dual damascene influenced by pre-clean

Tokei, Zsolt; Lanckmans, Filip; Van den Bosch, Geert; Van Hove, Marleen; Maex, Karen; Bender, Hugo; Hens, S.; Van Landuyt, J. (2002)