Browsing by author "Ogawa, Yuichi"
Now showing items 1-6 of 6
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Dissolution of germanium in sulfuric acid based solutions
Gan, Nobuko; Ogawa, Yuichi; Nagai, Tatsuo; Masaoka, Toru; Wostyn, Kurt; Sebaai, Farid; Holsteyns, Frank; Mertens, Paul (2015) -
Effect of dilute hydrogen peroxide in ultrapure water on SiGe epitaxial process
Masaoka, Toru; Gan, Nobuko; Fujimura, Yu; Ogawa, Yuichi; Wostyn, Kurt; Pacco, Antoine; Yoshida, Yukifuni; Holsteyns, Frank (2016) -
Impact of hydrogen peroxide in ultrapure water
Ogawa, Yuichi; Masaoka, Toru; Gan, Nobuko; Fujimura, Yu; Minato, Yasuharu; Miyazaki, Yoichi; Wostyn, Kurt; Pacco, Antoine; Holsteyns, Frank; Yoshida, Yukifumi (2017) -
Study of cobalt etch control by pH and oxidizer
Ogawa, Yuichi; Gan, Nobuko; Masaoka, Toru; Yoshimura, Minami; Iino, Hideaki; Le, Quoc Toan; Kesters, Els; Akanishi, Yuya; Holsteyns, Frank (2018) -
Study on La2O3 wet clean by pH controlled functional water
Ogawa, Yuichi; Hideaki, Iino; Fukui, Takeo; Oniki, Yusuke; Akanishi, Yuya; Altamirano Sanchez, Efrain; Holsteyns, Frank (2019) -
Study on La2O3 wet clean by pH controlled functional water
Ogawa, Yuichi; Iino, Hideaki; Fukui, Takeo; Oniki, Yusuke; Akanishi, Yuya; Altamirano Sanchez, Efrain; Holsteyns, Frank (2019)