Browsing by author "Godavarthi, Srinivas"
Now showing items 1-4 of 4
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Impact of UV cure time and wavelength on chemical, mechanical and electrical properties of PECVD deposited porous ultra low-k films
Godavarthi, Srinivas; Le, Quoc Toan; Verdonck, Patrick; Mardani, Shabnam; Vanstreels, Kris; Van Besien, Els; Baklanov, Mikhaïl (2012-03) -
Impact of wavelength of UV light and UV cure time on chemical and mechanical properties of PECVD deposited porous ultra low-k films
Godavarthi, Srinivas; Le, Quoc Toan; Verdonck, Patrick; Mardani, Shabnam; Vanstreels, Kris; Van Besien, Els; Baklanov, Mikhaïl (2013) -
Study of porogen removal by atomic hydrogen generated by hot wire chemical vapor deposition for the fabrication of advanced low-k thin films
Godavarthi, Srinivas; Wang, Cong; Verdonck, Patrick; Matsumoto, Y.; Koudriavtsev, I; Dutt, A.; Tielens, Hilde; Baklanov, Mikhaïl (2015) -
Study of porogen removal by HWCVD for the fabrication of advanced low-k films
Godavarthi, Srinivas; Wang, Cong; Verdonck, Patrick; Matsumoto, Yasuhiro; Koudriavtsev, I; Tielens, Hilde; Baklanov, Mikhaïl (2012)