Browsing by author "van de Kruijs, Robbert"
Now showing items 1-5 of 5
-
Advancing X-ray metrology for routine thin film analysis
Makhotkin, Igor; Fathabad, Zahra; Yakunin, Sergey; van de Kruijs, Robbert; Philipsen, Vicky; Luong, Vu; Bijkerk, Fred (2018) -
Evaluation of optical material parameters for advanced absorbers on EUV masks
Scholze, Frank; Laubis, Christian; Philipsen, Vicky; Luong, Vu; Edrisi, Arash; van de Kruijs, Robbert (2016) -
Mitigating EUV mask 3D effects by alternative metal absorbers
Philipsen, Vicky; Luong, Vu; Hendrickx, Eric; Erdmann, Andreas; Dongbo, Xu; Evanschitzky, Peter; van de Kruijs, Robbert; Edrisi, Arash; Scholze, Frank; Laubis, Christian; Irmscher, Mathias; Naasz, Sandra (2016) -
Novel EUV mask absorber evaluation in support of next-generation EUV imaging
Philipsen, Vicky; Luong, Vu; Opsomer, Karl; Detavernier, Christophe; Hendrickx, Eric; Erdmann, Andreas; Evanschitzky, Peter; van de Kruijs, Robbert; Heidarnia-Fathabad, Zahra; Scholze, Frank; Laubis, Christian (2018) -
Optimized EUV mask absorber stack for improved imaging by reducing roughness and crystallinity of alternative absorber materials
Luong, Vu; Philipsen, Vicky; Hendrickx, Eric; Scholze, Frank; van de Kruijs, Robbert; Edrisi, Arash; Wood, Obert; Heyns, Marc (2016)