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Mitigating EUV mask 3D effects by alternative metal absorbers
Publication:
Mitigating EUV mask 3D effects by alternative metal absorbers
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Date
2016
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Philipsen, Vicky
;
Luong, Vu
;
Hendrickx, Eric
;
Erdmann, Andreas
;
Xu, Dongbo
;
Evanschitzky, Peter
;
van de Kruijs, Robbert
;
Edrisi, Arash
;
Scholze, Frank
;
Laubis, Christian
;
Irmscher, Mathias
;
Naasz, Sandra
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2024
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2024
since deposited on 2021-10-23
2
last month
Acq. date: 2025-12-10
Citations