Publication:

Mitigating EUV mask 3D effects by alternative metal absorbers

Date

2016
Proceedings Paper
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Author(s)

Philipsen, Vicky  
;
Luong, Vu  
;
Hendrickx, Eric  
;
Erdmann, Andreas
;
Xu, Dongbo  
;
Evanschitzky, Peter
;
van de Kruijs, Robbert
;
Edrisi, Arash
;
Scholze, Frank
;
Laubis, Christian
;
Irmscher, Mathias
;
Naasz, Sandra

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2018 since deposited on 2021-10-23
Acq. date: 2025-10-24

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2018 since deposited on 2021-10-23
Acq. date: 2025-10-24

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