Browsing by author "Parac-Vogt, Tatjana"
Now showing items 1-5 of 5
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Characterization of 248nm deep ultraviolet (DUV) photoresist after ion implantation
Tsvetanova, Diana; Vos, Rita; Vereecke, Guy; Clemente, Francesca; Vanstreels, Kris; Conard, Thierry; Parac-Vogt, Tatjana; Mertens, Paul; Heyns, Marc (2009) -
Degradation of 248nm deep UV photoresist by ion implantation
Tsvetanova, Diana; Vos, Rita; Vereecke, Guy; Parac-Vogt, Tatjana; Clemente, Francesca; Vanstreels, Kris; Radisic, Dunja; Conard, Thierry; Franquet, Alexis; Jivanescu, M.; Nguyen, D. A. P.; Stesmans, Andre; Brijs, Bert; Mertens, Paul; Heyns, Marc (2011) -
Non-oxidizing solvent-based strip of ion implanted photoresist
Tsvetanova, Diana; Vos, Rita; Vanstreels, Kris; Radisic, Dunja; Sonnemans, Roger; Berry, Ivan; Waldfried, Carlo; Mattson, David; DeLuca, J; Vereecke, Guy; Mertens, Paul; Parac-Vogt, Tatjana; Heyns, Marc (2012) -
Non-oxidizing solvent-based strip of ion implanted photoresist
Tsvetanova, Diana; Vos, Rita; Vanstreels, Kris; Sonnemans, Roger; Berry, Ivan; Waldfried, Carlo; Mattson, David; DeLuca, J; Vereecke, Guy; Mertens, Paul; Parac-Vogt, Tatjana; Heyns, Marc (2010) -
Removal of high-dose ion-implanted 248nm deep UV photoresist using UV irradiation and organic solvent
Tsvetanova, Diana; Vos, Rita; Vanstreels, Kris; Radisic, Dunja; Sonnemans, Roger; Berry, Ivan; Waldfried, Carlo; Mattson, David; DeLuca, James; Vereecke, Guy; Mertens, Paul; Parac-Vogt, Tatjana; Heyns, Marc (2011)