Browsing by author "Nikolsky, Peter"
Now showing items 1-3 of 3
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Feasibility study of the approach to Flare, shadowing, optical and process corrections for EUVL OPC
Nikolsky, Peter; Davydova, Natalia; van Ingen Schenau, Koen; Van Adrichem, Paul; Hendrickx, Eric; Lorusso, Gian; Jiang, Jiong; Liu, Wei; Liu, Huayu (2009-09) -
Imaging challenges in 20nm and 14nm logic nodes: hot spots performance in Metal1 layer
Timoshkov, Vadim; Rio, David; Liu, H.; Gillijns, Werner; Wang, Jing; Wong, Patrick; Van Den Heuvel, Dieter; Wiaux, Vincent; Nikolsky, Peter; Finders, Jo (2013) -
Litho and patterning challenges for memory and logic applications at the 22nm node
Finders, Jo; Dusa, Mircea; Nikolsky, Peter; Van Dommelen, Youri; Watso, Robert; Vandeweyer, Tom; Bekaert, Joost; Laenens, Bart; Van Look, Lieve (2010)