Publication:
Imaging challenges in 20nm and 14nm logic nodes: hot spots performance in Metal1 layer
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1959 since deposited on 2021-10-21
1last month
Acq. date: 2026-04-07
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Statistics
Views
1959 since deposited on 2021-10-21
1last month
Acq. date: 2026-04-07
Citations