Imaging challenges in 20nm and 14nm logic nodes: hot spots performance in Metal1 layer

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Authors
Timoshkov, Vadim; Rio, David; Liu, H.; Gillijns, Werner; Wang, Jing; Wong, Patrick; Van Den Heuvel, Dieter; Wiaux, Vincent; Nikolsky, Peter; Finders, Jo
Conference
29th European Mask and Lithography Conference
Title
Imaging challenges in 20nm and 14nm logic nodes: hot spots performance in Metal1 layer
Publication type
Proceedings paper
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