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Imaging challenges in 20nm and 14nm logic nodes: hot spots performance in Metal1 layer

Date

2013
Proceedings Paper
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dc.contributor.authorTimoshkov, Vadim
dc.contributor.authorRio, David
dc.contributor.authorLiu, H.
dc.contributor.authorGillijns, Werner
dc.contributor.authorWang, Jing
dc.contributor.authorWong, Patrick
dc.contributor.authorVan Den Heuvel, Dieter
dc.contributor.authorWiaux, Vincent
dc.contributor.authorNikolsky, Peter
dc.contributor.authorFinders, Jo
dc.contributor.imecauthorRio, David
dc.contributor.imecauthorGillijns, Werner
dc.contributor.imecauthorWong, Patrick
dc.contributor.imecauthorVan Den Heuvel, Dieter
dc.contributor.imecauthorWiaux, Vincent
dc.contributor.orcidimecGillijns, Werner::0000-0002-2430-7360
dc.contributor.orcidimecWong, Patrick::0000-0003-3605-9680
dc.date.accessioned2021-10-21T12:44:13Z
dc.date.available2021-10-21T12:44:13Z
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23169
dc.identifier.urlhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1746550
dc.source.beginpage88860N
dc.source.conference29th European Mask and Lithography Conference
dc.source.conferencedate25/06/2013
dc.source.conferencelocationDresden Germany
dc.title

Imaging challenges in 20nm and 14nm logic nodes: hot spots performance in Metal1 layer

dc.typeProceedings paper
dspace.entity.typePublication
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