Publication:
Imaging challenges in 20nm and 14nm logic nodes: hot spots performance in Metal1 layer
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1960 since deposited on 2021-10-21
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Acq. date: 2026-04-27
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Statistics
Views
1960 since deposited on 2021-10-21
2last month
1last week
Acq. date: 2026-04-27
Citations