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Imaging challenges in 20nm and 14nm logic nodes: hot spots performance in Metal1 layer
Publication:
Imaging challenges in 20nm and 14nm logic nodes: hot spots performance in Metal1 layer
Date
2013
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Timoshkov, Vadim
;
Rio, David
;
Liu, H.
;
Gillijns, Werner
;
Wang, Jing
;
Wong, Patrick
;
Van Den Heuvel, Dieter
;
Wiaux, Vincent
;
Nikolsky, Peter
;
Finders, Jo
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1947
since deposited on 2021-10-21
Acq. date: 2025-10-23
Citations
Metrics
Views
1947
since deposited on 2021-10-21
Acq. date: 2025-10-23
Citations