Browsing by author "Breimer, P."
Now showing items 1-3 of 3
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Atomistic modeling of impurity ion implantation in ultra-thin-body Si devices
Pelaz, L.; Duffy, Ray; Aboy, M.; Marques, L.; Lopez, P.; Santos, I.; Pawlak, Bartek; Van Dal, Mark; Duriez, Blandine; Merelle, Thomas; Doornbos, Gerben; Collaert, Nadine; Witters, Liesbeth; Rooyackers, Rita; Vandervorst, Wilfried; Jurczak, Gosia; Kaiser, M.; Weemaes, R.; Van Berkum, J.; Breimer, P.; Lander, Rob (2008) -
Properties of ALD HfTaxOy high-k layers deposited on chemical silicon oxide
Zhao, Chao; Witters, Thomas; Breimer, P.; Maes, Jan; Caymax, Matty; De Gendt, Stefan (2007) -
Properties of HfTaxOy high-k layers deposited by ALCVD
Zhao, Chao; Rittersma, Z.M.; van Berkum, J.G.M.; Snijders, J.H.M.; Hendriks, A.; Breimer, P.; Graat, P.; Maes, Jan; Witters, H.; Afanasiev, Valeri; Tois, E.; Tuominen, N.; Caymax, Matty; De Gendt, Stefan; Heyns, Marc (2005)