Browsing by author "Varga, Istvan"
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A quantitative adhesion study between contacting materials in Cu damascene structures
Lanckmans, Filip; Brongersma, Sywert; Varga, Istvan; Poortmans, Jef; Bender, Hugo; Conard, Thierry; Maex, Karen (2002) -
A quantitative study of the adhesion between copper, barrier and organic low-k polymers
Lanckmans, Filip; Brongersma, Sywert; Varga, Istvan; Beyne, Eric; Maex, Karen (2000) -
A quantitative study of the adhesion between copper, barrier and organic low-k polymers
Lanckmans, Filip; Brongersma, Sywert; Varga, Istvan; Bender, Hugo; Beyne, Eric; Maex, Karen (2001)