A quantitative adhesion study between contacting materials in Cu damascene structures

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Authors

Lanckmans, Filip; Brongersma, Sywert; Varga, Istvan; Poortmans, Jef; Bender, Hugo; Conard, Thierry; Maex, Karen

Issue

1_4

Journal

Applied Surface Science

Volume

201

Title

A quantitative adhesion study between contacting materials in Cu damascene structures

Publication type

Journal article

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