Publication:
A quantitative adhesion study between contacting materials in Cu damascene structures
Date
| dc.contributor.author | Lanckmans, Filip | |
| dc.contributor.author | Brongersma, Sywert | |
| dc.contributor.author | Varga, Istvan | |
| dc.contributor.author | Poortmans, Jef | |
| dc.contributor.author | Bender, Hugo | |
| dc.contributor.author | Conard, Thierry | |
| dc.contributor.author | Maex, Karen | |
| dc.contributor.imecauthor | Brongersma, Sywert | |
| dc.contributor.imecauthor | Poortmans, Jef | |
| dc.contributor.imecauthor | Bender, Hugo | |
| dc.contributor.imecauthor | Conard, Thierry | |
| dc.contributor.imecauthor | Maex, Karen | |
| dc.contributor.orcidimec | Brongersma, Sywert::0000-0002-1755-3897 | |
| dc.contributor.orcidimec | Poortmans, Jef::0000-0003-2077-2545 | |
| dc.contributor.orcidimec | Conard, Thierry::0000-0002-4298-5851 | |
| dc.date.accessioned | 2021-10-14T22:08:14Z | |
| dc.date.available | 2021-10-14T22:08:14Z | |
| dc.date.issued | 2002 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/6515 | |
| dc.source.beginpage | 20 | |
| dc.source.endpage | 34 | |
| dc.source.issue | 1_4 | |
| dc.source.journal | Applied Surface Science | |
| dc.source.volume | 201 | |
| dc.title | A quantitative adhesion study between contacting materials in Cu damascene structures | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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