Browsing by author "Raineri, V."
Now showing items 1-4 of 4
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Assessing the performance of two and three dimensional dopant profiling techniques for sub-65nm technologies
Eyben, Pierre; Mody, Jay; Vemula, Sri Charan; Koelling, Sebastian; Verheyden, R.; Vandervorst, Wilfried; Raineri, V.; Giannazzo, F.; Verheijen, M.; Kim, D.H. (2007) -
Assessing the performance of two-dimensional dopant profiling techniques
Duhayon, Natasja; Eyben, Pierre; Fouchier, Marc; Clarysse, Trudo; Vandervorst, Wilfried; Alvarez, David; Schoemann, S.; Ciappa, M.; Stangoni, M.; Fichtner, W.; Formanek, P.; Raineri, V.; Giannazzo, F.; Goghero, D.; Rosenwaks, Y.; Shikler, R.; Saraf, S.; Sadewasser, S.; Barreau, N.; Glatzel, T.; Verheijen, M.; Mentink, S.A.M.; von Sprekelsen, M.; Maltezopoulos, T.; Wiesendanger, R.; Hellemans, L. (2003) -
Assessing the performance of two-dimensional dopant profiling techniques
Duhayon, Natasja; Eyben, Pierre; Fouchier, Marc; Clarysse, Trudo; Vandervorst, Wilfried; Álvarez, D.; Schoemann, S.; Ciappa, M.; Stangoni, M.; Fichtner, W.; Formanek, P.; Kittler, M.; Raineri, V.; Giannazzo, F.; Goghero, D.; Rosenwaks, Y.; Shikler, R.; Saraf, S.; Sadewasser, S.; Barreau, N.; Glatzel, T.; Verheijen, M.; Mentink, S.A.M.; von Sprekelsen, M.; Maltezopoulos, T.; Wiesendanger, R.; Hellemans, L. (2004) -
Nanoscale imaging and metrology of devices and innovative materials
Spinella, C.; Raineri, V.; Vandervorst, Wilfried; Ciappa, M. (2007)