Browsing by author "Masahito, Sugiura"
Now showing items 1-10 of 10
-
ALD of Al2O3 for carbon nanotube vertical interconnect and its impact on the electrical properties
Chiodarelli, Nicolo; Delabie, Annelies; Masahito, Sugiura; Kashiwagi, Yusaku; Richard, Olivier; Bender, Hugo; Cott, Daire; Heyns, Marc; De Gendt, Stefan; Groeseneken, Guido; Vereecken, Philippe (2011) -
Carbon nanotube interconnects: electrical characterization of CNT contacts with Cu damascene top contact
van der Veen, Marleen; Vereecke, Bart; Huyghebaert, Cedric; Cott, Daire; Masahito, Sugiura; Yusaku, Kashiwagi; Teugels, Lieve; Caluwaerts, Rudy; Beyer, Gerald; Heyns, Marc; Tokei, Zsolt; De Gendt, Stefan (2011) -
Characterization of carbon nanotubes based vertical interconnects
Vereecke, Bart; van der Veen, Marleen; Barbarin, Yohan; Masahito, Sugiura; Kashiwagi, Yusaku; Cott, Daire; Huyghebaert, Cedric; Tokei, Zsolt (2012) -
Electrical and structural characterization of 150 nm CNT contacts with Cu damascene top metallization
van der Veen, Marleen; Vereecke, Bart; Masahito, Sugiura; Kashiwagi, Yusaku; Ke, Xiaoxing; Cott, Daire; Vanpaemel, Johannes; Vereecken, Philippe; De Gendt, Stefan; Huyghebaert, Cedric; Tokei, Zsolt (2012) -
Electrical characterization of CNT contacts with Cu damascene top contact
van der Veen, Marleen; Vereecke, Bart; Huyghebaert, Cedric; Cott, Daire; Masahito, Sugiura; Kashiwagi, Yusaku; Teugels, Lieve; Caluwaerts, Rudy; Chiodarelli, Nicolo; Vereecken, Philippe; Beyer, Gerald; Heyns, Marc; De Gendt, Stefan; Tokei, Zsolt (2013) -
Electrical improvement of CNT contacts with Cu damascene top metallization
van der Veen, Marleen; Barbarin, Yohan; Vereecke, Bart; Masahito, Sugiura; Kashiwagi, Yusaki; Cott, Daire; Huyghebaert, Cedric; Tokei, Zsolt (2013) -
Growth and integration challenges for carbon nanotubes interconnects
Vanpaemel, Johannes; Masahito, Sugiura; Barbarin, Yohan; De Gendt, Stefan; Tokei, Zsolt; Vereecken, Philippe; van der Veen, Marleen (2014) -
Low temperature CNT growth for BEOL interconnects
Cott, Daire; Masahito, Sugiura; Vanpaemel, Johannes; van der Veen, Marleen; Tokei, Zsolt; Vereecken, Philippe (2013) -
Low temperature CNT growth kinetics for interconnects
Vanpaemel, Johannes; Masahito, Sugiura; Cott, Daire; van der Veen, Marleen; Tokei, Zsolt; De Gendt, Stefan; Vereecken, Philippe (2013) -
Measuring the electrical resistivity and contact resistance of vertical carbon nanotube bundles for application as interconnects
Chiodarelli, Nicolo; Masahito, Sugiura; Kashiwagi, Yusaku; Li, Yunlong; Arstila, Kai; Richard, Olivier; Cott, Daire; Heyns, Marc; De Gendt, Stefan; Groeseneken, Guido; Vereecken, Philippe (2011)