Low temperature CNT growth kinetics for interconnects

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Authors
Vanpaemel, Johannes; Masahito, Sugiura; Cott, Daire; van der Veen, Marleen; Tokei, Zsolt; De Gendt, Stefan; Vereecken, Philippe
Conference
MRS Fall Meeting
Title
Low temperature CNT growth kinetics for interconnects
Publication type
Meeting abstract
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