Browsing by author "Pfeffer, Markus"
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Performance optimization of semiconductor manufacturing equipment by the application of discrete event simulation
Pfeffer, Markus; Oechsner, Richard; Pfitzner, Lothar; Ryssel, Heiner; Ocker, Berthold; Verdonck, Patrick (2008) -
Photo-voltage versus micro-probe sheet resistance measurements on ultra-shallow structures
Clarysse, Trudo; Moussa, Alain; Parmentier, Brigitte; Bogdanowicz, Janusz; Cornagliotti, Emanuele; Vandervorst, Wilfried; Bender, Hugo; Pfeffer, Markus; Schellenberger, Martin; Nielsen, Peter; Thorsteinsson, Sune; Lin, Rong; Petersen, Dirch (2009) -
Photovoltage versus microprobe sheet resistance measurements on ultrashallow structures
Clarysse, Trudo; Moussa, Alain; Parmentier, Brigitte; Bogdanowicz, Janusz; Vandervorst, Wilfried; Bender, Hugo; Pfeffer, Markus; Schellenberger, Martin; Nielsen, Peter; Thorsteinsson, Sune; Lin, Rong; Petersen, Dirch (2010)