Browsing by author "Miakonkikh, A."

Now showing items 1-3 of 3

Cryogenic etching of porous low-k dielectrics in CF3Br plasma

Rezvanov, Askar; Miakonkikh, A.; Vishnevskiy, A.; Gitshin, O.; Rudenko, K.; Baklanov, Mikhaïl (2016)
Investigation of plasma damage of low-k dielectrics during cryogenic etching

Rezvanov, A.; Miakonkikh, A.; Vishnevsky, A.; Gutshin, O.; Gornev, E.; Krasnikov, G.; Mogilnikov, K.; Rudenko, K.; Baklanov, Mikhaïl (2015)
Low-k protection from F radicals and VUV photons using a multilayer pore grafting approach

Zotovich, Alexey; Rezvanov, Askar; Chanson, Romain; Zhang, L.; Hacker, N.; Kurchikov, K.; Klimin, S.; Zyryanov, S. M.; Lopaev, Dimitri; Gornev, E.; Clemente, I.; Miakonkikh, A.; Maslakov, K. (2018)