Browsing by author "Rothwell, W. J."
Now showing items 1-3 of 3
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An Advanced Calibration Method for Modelling Oxidation and Mechanical Stress in Sub-Micron CMOS Isolation Structures
Jones, S. K.; Poncet, A.; De Wolf, Ingrid; Ahmed, M.; Rothwell, W. J. (1994) -
Characterisation of mechanical stress in advanced PBL isolation
Jones, S. K.; Ahmed, M.; Rothwell, W. J.; De Wolf, Ingrid; Deferm, Ludo (1994) -
Characterisation of mechanical stresses of device isolation structures by micro-Raman spectroscopy and modelling
Jones, S. K.; Ahmed, M.; Bazley, D. J.; Beanland, R. J.; De Wolf, Ingrid; Hill, C.; Rothwell, W. J. (1999)