Browsing by author "MacKenzie, M."
Now showing items 1-4 of 4
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A nanoanalytical investigation of elemental distributions in high-k dielectric gate stacks on silicon
Docherty, F.T.; MacKenzie, M.; Craven, A.J.; McComb, D.W.; De Gendt, Stefan; McFadzean, S.; McGilvery, C.M. (2008-01) -
Advanced nanoanalysis of a Hf-based high-k dielectric stack prior to activation
MacKenzie, M.; Craven, A.J.; McComb, D.W.; De Gendt, Stefan; Docherty, F.T.; McGilvery, C.M.; McFadzean, S. (2007) -
EELS analyses of metal-inserted high-k dielectric stacks
MacKenzie, M.; Craven, A.J.; McComb, D.W.; McGilvery, C.M.; McFadzean, S.; De Gendt, Stefan (2008) -
Texture, twinning and metastable "tetragonal" phase in ultrathin films of HfO2 on a Si substrate
MacLaren, I.; Ras, T.; MacKenzie, M.; Craven, A.J.; McComb, D.W.; De Gendt, Stefan (2009)