Browsing by author "Tanaka, Tetsu"
Now showing items 1-9 of 9
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Conformal Cu electroless seed on Co and Ru liners enables Cu fill by plating for advanced interconnects
van der Veen, Marleen; Inoue, Fumihiro; Vandersmissen, Kevin; Dictus, Dries; Tanaka, Tetsu; Boemmels, Juergen; Struyf, Herbert; Tokei, Zsolt (2016) -
Cu seeding using electroless deposition on Ru liner for high aspect ratio through-Si vias
Inoue, Fumihiro; Philipsen, Harold; van der Veen, Marleen; Vandersmissen, Kevin; Van Huylenbroeck, Stefaan; Struyf, Herbert; Tanaka, Tetsu (2014) -
Development of glyoxylic acid based electroless copper deposition on ruthenium
Inoue, Fumihiro; Philipsen, Harold; van der Veen, Marleen; Van Huylenbroeck, Stefaan; Armini, Silvia; Struyf, Herbert; Tanaka, Tetsu; Shingubara, Shoso (2014) -
Development of glyoxylic acid based electroless copper deposition on ruthenium
Inoue, Fumihiro; Philipsen, Harold; van der Veen, Marleen; Van Huylenbroeck, Stefaan; Armini, Silvia; Struyf, Herbert; Shingubara, Shoso; Tanaka, Tetsu (2015) -
Electroless Cu seed on Ru and Co liners in high aspect ratio TSV
Inoue, Fumihiro; Philipsen, Harold; Van Huylenbroeck, Stefaan; van der Veen, Marleen; Armini, Silvia; Struyf, Herbert; Tanaka, Tetsu (2014) -
Glyoxylic acid as reducing agent for electroless copper deposition on cobalt liner
Inoue, Fumihiro; Philipsen, Harold; van der Veen, Marleen; Van Huylenbroeck, Stefaan; Armini, Silvia; Struyf, Herbert; Tanaka, Tetsu (2014) -
Glyoxylic acid as reducing agent for electroless copper deposition on cobalt liner
Inoue, Fumihiro; Philipsen, Harold; van der Veen, Marleen; Van Huylenbroeck, Stefaan; Armini, Silvia; Struyf, Herbert; Shingubara, Shoso; Tanaka, Tetsu (2015) -
Nucleation kinetics of electroless Cu deposition on ruthenium using glyoxylic acid as reducing agent
Inoue, Fumihiro; Philipsen, Harold; van der Veen, Marleen; Van Huylenbroeck, Stefaan; Armini, Silvia; Struyf, Herbert; Tanaka, Tetsu (2014) -
Role of bath composition in electroless Cu seeding on Co liner for through-Si vias
Inoue, Fumihiro; Philipsen, Harold; van der Veen, Marleen; Van Huylenbroeck, Stefaan; Armini, Silvia; Struyf, Herbert; Tanaka, Tetsu (2015-01)