Browsing by author "Collart, E.H.J."

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Damage accumulation and dopant migration during shallow As and Sb implantation into Si

Werner, M.; van den Berg, J.A.; Armour, D.G.; Vandervorst, Wilfried; Collart, E.H.J.; Goldberg, R.D.; Bailey, P.; Noakes, T.C.Q. (2004)
High depth resolution characterization of the damage and annealing behaviour of ultrashallow As-implants in Si

van den Berg, J.A.; Armour, D.G.; Werner, M.; Whelan, S.; Vandervorst, Wilfried; Clarysse, Trudo; Collart, E.H.J.; Goldberg, R.D.; Bailey, P.; Noakes, T.C.Q. (2002)
Sub nanometer depth resolution profiling of the evolution and annealing of damage and the dopant redistribution of ultra-shallow As and Sb implants in Si

van den Berg, J.A.; Werner, M.; Armour, D.G.; Vandervorst, Wilfried; Clarysse, Trudo; Collart, E.H.J.; Goldberg, R.D.; Bailey, P.; Noakes, T.C. (2003)