Browsing by author "Lecordier, Laurent"
Now showing items 1-5 of 5
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Applications of smart monomolecular films in IC microelectronics for organic-inorganic interface engineering
Armini, Silvia; Herregods, Sebastiaan; Lecordier, Laurent; Verheyen, Claudia; Delande, Tinne; Demeurisse, Caroline; Spampinato, Valentina; Tokei, Zsolt; Struyf, Herbert (2017) -
Developing a full wafer-scale approach towards high ALD selectivity on copper vs low-K (and oxides) using a single ALD/SAMS platform
Lecordier, Laurent; Armini, Silvia; Herregods, Sebastiaan (2017) -
Novel method to achieve area selective ALD on copper metal vs. SiO2using vapor-phase deposited SAMS
Lecordier, Laurent; Armini, Silvia (2016) -
Vapor phase thiol self-assembled monolayers for ALD blocking
Herregods, Sebastiaan; Lecordier, Laurent; Delande, Tinne; Tokei, Zsolt; Struyf, Herbert; Armini, Silvia (2018) -
Vapor-deposited octadecanethiol masking layer on copper to enable area selective Hf3N4 atomic layer deposition on dielectrics studied by in situ spectroscopic ellipsometry
Lecordier, Laurent; Herregods, Sebastiaan; Armini, Silvia (2018)