Browsing by author "Meszaros, Albert"
Now showing items 1-3 of 3
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Non-contact metrology for inversion charge carrier mobility by corona charge and photovoltage measurements on blank wafers with a gate dielectric
Everaert, Jean-Luc; Rosseel, Erik; Pap, Aron; Meszaros, Albert; Dekoster, Johan; Pavelka, Tibor (2010) -
Noncontact metrology for inversion charge carrier mobility by corona charge and photovoltage measurements on blank wafers with a gate dielectric
Everaert, Jean-Luc; Rosseel, Erik; Pap, Aron; Meszaros, Albert; Dekoster, Johan; Pavelka, Tibor (2011) -
Novel noncontact approach to characterization of mobility in inversion layers using corona charging of dielectric and SPV monitoring of sheet resistance
Everaert, Jean-Luc; Rosseel, Erik; Meszaros, Albert; Kis-Szabo, Krisztian; Tutto, P; Pap, Aron; Pavelka, Tibor; Wilson, Marshall; Findlay, Andrew; Edelman, P.; Lagowski, Jacek (2010)