Browsing by author "Savage, Travis"
Now showing items 1-3 of 3
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Cryogenic etching vs P4 approaches: paths towards ultra-low damage integration of mesoporous oxide dielectric materials
de Marneffe, Jean-Francois; Zhang, Liping; Heyne, Markus; Krishtab, Mikhail; Goodyear, Andy; Cooke, Mike; Heylen, Nancy; Ciofi, Ivan; Wen, Liang Gong; Wilson, Chris; Rutigliani, Vito; Decoster, Stefan; Savage, Travis; Matsunaga, Koichi; Nafus, Kathleen; Boemmels, Juergen; Tokei, Zsolt; Baklanov, Mikhaïl (2014) -
Improvement of cohesion strength in ULK OSG materials by pore structure adjustment
Krishtab, Mikhail; Vanstreels, Kris; Savage, Travis; Matsunaga, Koichi; De Gendt, Stefan; Baklanov, Mikhaïl (2015) -
Ultra-low damage integration of k= 2.3 periodic mesoporous oxide dielectric material using cryogenic etching
de Marneffe, Jean-Francois; Zhang, Liping; Krishtab, Mikhail; Goodyear, Andy; Cooke, Mike; Heylen, Nancy; Ciofi, Ivan; Wen, Liang Gong; Wilson, Chris; Savage, Travis; Matsunaga, Koichi; Nafus, Kathleen; Boemmels, Juergen; Tokei, Zsolt; Baklanov, Mikhaïl (2014)