Browsing by author "Zekry, Joseph"
Now showing items 1-8 of 8
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Built-in self-limitation of masked aluminum anodization using photoresist
Zekry, Joseph; Celis, Jean-Pierre; Sabuncuoglu Tezcan, Deniz; Puers, Bob; Van Hoof, Chris; Tilmans, Harrie (2011) -
Design, fabrication and testing of wafer-level thin film vacuum packages for MEMS based on nanoporous alumina membranes
Zekry, Joseph; Sabuncuoglu Tezcan, Deniz; Cherman, Vladimir; Varela Pedreira, Olalla; Wang, Bo; El Ghannudi, Hamza; Celis, Jean-Pierre; Puers, Bob; Van Hoof, Chris; Tilmans, Harrie (2013-01) -
Experimental verification of high-NA imaging simulations using SHARP
Davydova, Natalia; Liu, Fei; Benk, Markus; van Setten, Eelco; Bottiglieri, Gerardo; van Oosten, Anton; McNamara, John; Wiaux, Vincent; Franke, Joern-Holger; Goldberg, Kenneth; Nam, D. S.; Zekry, Joseph; Naulleau, Patrick; Fliervoet, Timon; Carpaij, Rene (2020) -
Fundamental understanding and experimental verification of bright versus dark field imaging
Davydova, Natalia; Finders, Jo; van Lare, Claire; McNamara, John; Van Setten, Eelco; Zekry, Joseph; Fliervoet, Timon; Carpaij, Rene; Franke, Joern-Holger; Frommhold, Andreas; Verch, Andreas; Kersteen, Grizelda; Capelli, Renzo (2020) -
MEMS packaging and reliability: An undividable couple
Tilmans, Harrie; De Coster, Jeroen; Helin, Philippe; Cherman, Vladimir; Jourdain, Anne; De Moor, Piet; Vandevelde, Bart; Pham, Nga; Zekry, Joseph; Witvrouw, Ann; De Wolf, Ingrid (2012) -
Thermomechanical design and modeling of porous alumina-based thin film packages for MEMS
Zekry, Joseph; Vandevelde, Bart; Bouwstra, Siebe; Puers, Bob; Van Hoof, Chris; Tilmans, Harrie (2010-04) -
Wafer scale fabrication of miniature vacuum packages for MEMS/NEMS using thin membranes of nanoporous alumina
Zekry, Joseph; Sabuncuoglu Tezcan, Deniz; Celis, Jean-Pierre; Puers, Bob; Van Hoof, Chris; Tilmans, Harrie (2012) -
Wafer-level thin film vacuum packages for MEMS using nanoporous anodic alumina membranes
Zekry, Joseph; Sabuncuoglu Tezcan, Deniz; Celis, Jean-Pierre; Puers, Bob; Van Hoof, Chris; Tilmans, Harrie (2011-06)