Browsing by author "Nguyen, Mai Phuong"
Now showing items 1-3 of 3
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Characterization of patterned porous low-k dielectrics: surface sealing and residue removal by wet processing/cleaning
Le, Quoc Toan; Kesters, Els; Decoster, Stefan; Chan, BT; Nguyen, Mai Phuong; Conard, Thierry; Vanleenhove, Anja; Holsteyns, Frank; De Gendt, Stefan (2016) -
CVD-Mn(Nx) as copper diffusion barrier for advanced interconnect technologies
Jourdan, Nicolas; Machillot, Jerome; Barbarin, Yohan; Siew, Yong Kong; Ai, Hua; Cockburn, Andrew; Nguyen, Mai Phuong; Van Elshocht, Sven; Boemmels, Juergen; Lakshmanan, A.; Ma, Paul; Narasimhan, Murali; Tokei, Zsolt (2013) -
HF etching mechanisms of advanced low-k films
Verdonck, Patrick; Le, Quoc Toan; Krishtab, Mikhail; Vanstreels, Kris; Armini, Silvia; Simone, A.; Nguyen, Mai Phuong; Van Elshocht, Sven; Baklanov, Mikhaïl (2014)