Authors

Le, Quoc Toan; Kesters, Els; Decoster, Stefan; Chan, BT; Nguyen, Mai Phuong; Conard, Thierry; Vanleenhove, Anja; Holsteyns, Frank; De Gendt, Stefan

ISSN

2162-8769

Issue

3

Journal

ECS Journal of Solid State Science and Technology

Volume

5

Title

Characterization of patterned porous low-k dielectrics: surface sealing and residue removal by wet processing/cleaning

Publication type

Journal article