Browsing by author "Guzman, B."
Now showing items 1-3 of 3
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Simulation of the initial transient of the Si+ and O+ signals from oxygen sputtered silicon by means of independent models on sputtering and secondary ionization
Serrano, J. J.; De Witte, Hilde; Vandervorst, Wilfried; Guzman, B.; Blanco, J. M. (2001) -
Steady state oxygen surface content in oxygen sputtered silicon at impact energy of 5 Kev per atom
Serrano, J. J.; Blanco, J. M.; Guzman, B.; De Witte, Hilde; Vandervorst, Wilfried (2001) -
Synthesizing a secondary ionization model for matrix elements sputtered from SiOx: findings and trends
Serrano, Javier; De Witte, Hilde; Guzman, B.; Blanco, J. M.; Vandervorst, Wilfried (2000)