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Steady state oxygen surface content in oxygen sputtered silicon at impact energy of 5 Kev per atom
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Authors
Serrano, J. J.
;
Blanco, J. M.
;
Guzman, B.
;
De Witte, Hilde
;
Vandervorst, Wilfried
Issue
9
Journal
Journal of Applied Physics
Volume
90
Title
Steady state oxygen surface content in oxygen sputtered silicon at impact energy of 5 Kev per atom
Publication type
Journal article
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