Browsing by author "List, Scott"
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157nm resist process performance and integration challenges on a full field scanner
Goethals, Mieke; Gronheid, Roel; List, Scott; Ercken, Monique; Van Roey, Frieda; Van Den Heuvel, Dieter; Locorotondo, Sabrina; Ronse, Kurt (2004) -
A methodology for the characterization of topography induced immersion bubble defects
Kocsis, Michael; De Bisschop, Peter; Maenhoudt, Mireille; Kim, Young-Chang; Wells, Greg; List, Scott; DiBiase, Tony (2005) -
Advanced metrologies for cleans characterization: ARXPS, GIXF and NEXAFS
Conard, Thierry; List, Scott; Claes, Martine; Beckhoff, Buckard (2008) -
Cu resistivity scaling limits for 20 nm copper damascene lines
Van Olmen, Jan; List, Scott; Tokei, Zsolt; Carbonell, Laure; Brongersma, Sywert; Volders, Henny; Kunnen, Eddy; Heylen, Nancy; Ciofi, Ivan; Khandelwal, A.; Gelatos, J.; Mandrekar, T.; Boelen, Pieter (2007) -
Depth-profiling of vertical sidewall nanolayers on structured wafers by grazing incidence X-ray fluorescence
Honicke, P.; Beckhoff, B.; Kolbe, M.; List, Scott; Conard, Thierry; Struyf, Herbert (2008) -
Experimental validation of crosstalk simulations for on-chip interconnects using S-parameters
Kobrinsky, M.J.; Chakravarty, S.; Jiao, D.; Harmes, M.C.; List, Scott; Mazumder, M. (2005) -
High performance 3D : a cost benefit analysis
List, Scott; Beyne, Eric (2007) -
Phase identification of self-forming Cu-Mn based diffusion barriers on p-SiOC:H and SiO2 dielectrics using x-ray absorption fine structures
Ablett, James; Woicik, Joseph; Tokei, Zsolt; List, Scott; Dimasi, Elaine (2009) -
The third dimension: fact or fiction?
List, Scott (2005) -
Thermo-mechanical properties of thin organosilicate glass films treated by ultra-violet-assisted cure
Iacopi, Francesca; Beyer, Gerald; Travaly, Youssef; Waldfried, Carlo; Gage, David M.; Dauskardt, Reinhold; Houthoofd, Kristof; Jacobs, Pierre; Adriaensens, Peter; Schulze, Knut; Schulz, Stefan; List, Scott; Carlotti, Giovanni (2007-02)