Browsing by author "Colsters, Paul"

Now showing items 1-3 of 3

    • SAQP and EUV block patterning of BEOL metal layers on IMEC's iN7 platform 

      Bekaert, Joost; Di Lorenzo, Paolo; Mao, Ming; Decoster, Stefan; Lariviere, Stephane; Franke, Joern-Holger; Blanco, Victor; Kutrzeba Kotowska, Bogumila; Lazzarino, Frederic; Gallagher, Emily; Hendrickx, Eric; Leray, Philippe; Kim, Ryan Ryoung han; McIntyre, Greg; Colsters, Paul; Wittebrood, Friso; van Dijk, Joep; Maslow, Mark; Timoshkov, Vadim; Kiers, Ton (2017)

    • Single exposure EUV block downscaling for metal pitches below 32nm 

      Franke, Joern-Holger; Colsters, Paul; Bekaert, Joost; Hendrickx, Eric; Wittebrood, F.; Pathak, Abhinav; Schiffelers, Guido (2017)

    • The imec iN7 EUV platform: M2-Block and Via patterning developments 

      Bekaert, Joost; Franke, Joern-Holger; Mao, Ming; Lariviere, Stephane; Decoster, Stefan; Di Lorenzo, Paolo; Kutrzeba Kotowska, Bogumila; Blanco, Victor; Hendrickx, Eric; Gallagher, Emily; Leray, Philippe; Kim, Ryan Ryoung han; McIntyre, Greg; Colsters, Paul; Wittebrood, Friso; van Dijk, Joep; Timoshkov, Vadim; Kiers, Ton; Maslow, Mark (2016)