SAQP and EUV block patterning of BEOL metal layers on IMEC's iN7 platform

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Authors
Bekaert, Joost; Di Lorenzo, Paolo; Mao, Ming; Decoster, Stefan; Lariviere, Stephane; Franke, Joern-Holger; Blanco, Victor; Kutrzeba Kotowska, Bogumila; Lazzarino, Frederic; Gallagher, Emily; Hendrickx, Eric; Leray, Philippe; Kim, Ryan Ryoung han; McIntyre, Greg; Colsters, Paul; Wittebrood, Friso; van Dijk, Joep; Maslow, Mark; Timoshkov, Vadim; Kiers, Ton
Conference
Extreme Ultraviolet (EUV) Lithography VIII
Title
SAQP and EUV block patterning of BEOL metal layers on IMEC's iN7 platform
Publication type
Proceedings paper
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