Publication:
SAQP and EUV block patterning of BEOL metal layers on IMEC's iN7 platform
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2118 since deposited on 2021-10-24
8last month
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Acq. date: 2026-08-07
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Statistics
Views
2118 since deposited on 2021-10-24
8last month
2last week
Acq. date: 2026-08-07
Citations