Publication:
SAQP and EUV block patterning of BEOL metal layers on IMEC's iN7 platform
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2117 since deposited on 2021-10-24
7last month
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Acq. date: 2026-08-06
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Statistics
Views
2117 since deposited on 2021-10-24
7last month
1last week
Acq. date: 2026-08-06
Citations