Publication:

The imec iN7 EUV platform: M2-Block and Via patterning developments

Date

2016

Proceedings Paper

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Author(s)

;

Franke, Joern-Holger

;

;

Lariviere, Stephane

;

Decoster, Stefan

;

Di Lorenzo, Paolo

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Kutrzeba Kotowska, Bogumila

;

Blanco, Victor

;

Hendrickx, Eric

;

Gallagher, Emily

;

Leray, Philippe

;

Kim, Ryan Ryoung han

;

;

;

Wittebrood, Friso

;

;

Timoshkov, Vadim

;

;

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