Publication:

The imec iN7 EUV platform: M2-Block and Via patterning developments

Date

2016

Proceedings Paper

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Author(s)

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Franke, Joern-Holger

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Lariviere, Stephane

;

Decoster, Stefan

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Di Lorenzo, Paolo

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Kutrzeba Kotowska, Bogumila

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;

Hendrickx, Eric

;

Gallagher, Emily

;

Leray, Philippe

;

Kim, Ryan Ryoung han

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;

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Wittebrood, Friso

;

;

Timoshkov, Vadim

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2003 since deposited on 2021-10-23

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Acq. date: 2026-09-18