The imec iN7 EUV platform: M2-Block and Via patterning developments

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Author(s)

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Franke, Joern-Holger

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Lariviere, Stephane

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Decoster, Stefan

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Di Lorenzo, Paolo

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Kutrzeba Kotowska, Bogumila

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Hendrickx, Eric

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Gallagher, Emily

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Leray, Philippe

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Kim, Ryan Ryoung han

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Wittebrood, Friso

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Timoshkov, Vadim

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Metrics

1971 since deposited on 2021-10-23

Acq. date: 2025-10-24