Publication:

The imec iN7 EUV platform: M2-Block and Via patterning developments

Date

2016

Proceedings Paper

Simple item page Full metadata Statistics

Author(s)

;

Franke, Joern-Holger

;

;

Lariviere, Stephane

;

Decoster, Stefan

;

Di Lorenzo, Paolo

;

Kutrzeba Kotowska, Bogumila

;

;

Hendrickx, Eric

;

Gallagher, Emily

;

Leray, Philippe

;

Kim, Ryan Ryoung han

;

;

;

Wittebrood, Friso

;

;

Timoshkov, Vadim

;

;

Statistics

1986 since deposited on 2021-10-23

2last month

1last week

Acq. date: 2026-07-17