Browsing by author "Kostermans, Maarten"
Now showing items 1-6 of 6
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Dependence of etching rate on aspect ratio for high aspect TSV etching
Taichi, Nishio; Aoi, Nobuo; Sasago, Masaru; Kubota, Masafumi; Kostermans, Maarten; Brouri, Mohand; Dupont, Tania (2010) -
Exploring high aspEct ratio 2μm TSV (25:1)
Kostermans, Maarten; Brouri, Mohand; Baier, Ulrich; Vertommen, Johan; Pageau, Arnaud; Boullart, Werner (2011-11) -
Impact of thinning and through silicon via proximity on high-k / metal gate first CMOS performance
Mercha, Abdelkarim; Redolfi, Augusto; Stucchi, Michele; Minas, Nikolaos; Van Olmen, Jan; Thangaraju, Sarasvathi; Velenis, Dimitrios; Domae, Shinichi; Yang, Yu; Katti, Guruprasad; Labie, Riet; Okoro, Chukwudi; Zhao, Ming; Asimakopoulos, Panagiotis; De Wolf, Ingrid; Chiarella, Thomas; Schram, Tom; Rohr, Erika; Van Ammel, Annemie; Jourdain, Anne; Ruythooren, Wouter; Armini, Silvia; Radisic, Alex; Philipsen, Harold; Heylen, Nancy; Kostermans, Maarten; Jaenen, Patrick; Sleeckx, Erik; Sabuncuoglu Tezcan, Deniz; Debusschere, Ingrid; Soussan, Philippe; Perry, Dan; Van der Plas, Geert; Cho, Jong Hoon; Marchal, Pol; Travaly, Youssef; Beyne, Eric; Biesemans, Serge; Swinnen, Bart (2010) -
Implementation of an industry compliant, 5×50μm, via-middle TSV technology on 300mm wafers
Redolfi, Augusto; Velenis, Dimitrios; Thangaraju, Sarasvathi; Nolmans, Philip; Jaenen, Patrick; Kostermans, Maarten; Baier, Ulrich; Van Besien, Els; Dekkers, Harold; Witters, Thomas; Jourdan, Nicolas; Van Ammel, Annemie; Vandersmissen, Kevin; Rodet, Simon; Philipsen, Harold; Radisic, Alex; Heylen, Nancy; Travaly, Youssef; Swinnen, Bart; Beyne, Eric (2011-06) -
Novel dual layer floating gate structure as enabler of fully planar flash memory
Blomme, Pieter; Rosmeulen, Maarten; Cacciato, Antonio; Kostermans, Maarten; Vrancken, Christa; Van Aerde, Steven; Schram, Tom; Debusschere, Ingrid; Jurczak, Gosia; Van Houdt, Jan (2010) -
Through-silicon via technology for three-dimensional integrated circuit manufacturing
Civale, Yann; Redolfi, Augusto; Jaenen, Patrick; Kostermans, Maarten; Van Besien, Els; Mertens, Sofie; Witters, Thomas; Jourdan, Nicolas; Armini, Silvia; Vandersmissen, Kevin; Philipsen, Harold; Verdonck, Patrick; Heylen, Nancy; Nolmans, Philip; Li, Yunlong; Croes, Kristof; Beyer, Gerald; Swinnen, Bart; Beyne, Eric (2012)