Browsing by author "Werner, M."
Now showing items 1-5 of 5
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Characterization of low energy (2-5keV) implantation into Si
Collart, E.J.; Kirkwood, D.; Vandenberg, J.A.; Werner, M.; Vandervorst, Wilfried; Brijs, Bert; Bailey, P.; Noakes, T.C.Q. (2002) -
Damage accumulation and dopant migration during shallow As and Sb implantation into Si
Werner, M.; van den Berg, J.A.; Armour, D.G.; Vandervorst, Wilfried; Collart, E.H.J.; Goldberg, R.D.; Bailey, P.; Noakes, T.C.Q. (2004) -
High depth resolution characterization of the damage and annealing behaviour of ultrashallow As-implants in Si
van den Berg, J.A.; Armour, D.G.; Werner, M.; Whelan, S.; Vandervorst, Wilfried; Clarysse, Trudo; Collart, E.H.J.; Goldberg, R.D.; Bailey, P.; Noakes, T.C.Q. (2002) -
Quantitative analysis of thin dielectrica with ultra high resolution ERD, MEIS and RBS
Vandervorst, Wilfried; Conard, Thierry; Giangrandi, Simone; Brijs, Bert; Bergmaier, A.; Kimura, K.; van den Berg, J.A.; Werner, M. (2007) -
Sub nanometer depth resolution profiling of the evolution and annealing of damage and the dopant redistribution of ultra-shallow As and Sb implants in Si
van den Berg, J.A.; Werner, M.; Armour, D.G.; Vandervorst, Wilfried; Clarysse, Trudo; Collart, E.H.J.; Goldberg, R.D.; Bailey, P.; Noakes, T.C. (2003)