Browsing by author "Kimura, Y."
Now showing items 1-3 of 3
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15nm HP patterning with EUV and SADP: key contributors for improvement of LWR, LER, and CDU
Xu, Kaidong; Souriau, Laurent; Hellin, David; Versluijs, Janko; Wong, Patrick; Vangoidsenhoven, Diziana; Vandenbroeck, Nadia; Dekkers, Harold; Shi, Xiaoping; Albert, Johan; Tan, Chi Lim; Vertommen, Johan; Coenegrachts, Bart; Orain, I.; Kimura, Y.; Wiaux, Vincent; Boullart, Werner (2013) -
Novel junction design for NMOS Si bulk-FinFETs with extension doping by phosphorus doped silicate glass
Sasaki, Yuichiro; Ritzenthaler, Romain; Kimura, Y.; De Roest, David; Shi, Xiaoping; De Keersgieter, An; Kim, Min-Soo; Chew, Soon Aik; Kubicek, Stefan; Schram, Tom; Kikuchi, Yoshiaki; Demuynck, Steven; Veloso, Anabela; Vandervorst, Wilfried; Horiguchi, Naoto; Mocuta, Dan; Mocuta, Anda; Thean, Aaron (2015) -
The influence of post-etch InGaAs Fin profile on electrical performance
Ivanov, Tsvetan; Pourghaderi, Mohammad Ali; Lin, Dennis; Yu, Jen-Kan; Tan, S.; Mikhaylich, K.; Kimura, Y.; Hellin, David; Geypen, Jef; Bender, Hugo; Vertommen, Johan; Kamarthy, G.; Collaert, Nadine; Marks, J.; Vahedi, V; Arghavani, R.; Thean, Aaron (2013)