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Novel junction design for NMOS Si bulk-FinFETs with extension doping by phosphorus doped silicate glass
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Authors
Sasaki, Yuichiro
;
Ritzenthaler, Romain
;
Kimura, Y.
;
De Roest, David
;
Shi, Xiaoping
;
De Keersgieter, An
;
Kim, Min-Soo
;
Chew, Soon Aik
;
Kubicek, Stefan
;
Schram, Tom
;
Kikuchi, Yoshiaki
;
Demuynck, Steven
;
Veloso, Anabela
;
Vandervorst, Wilfried
;
Horiguchi, Naoto
;
Mocuta, Dan
;
Mocuta, Anda
;
Thean, Aaron
Conference
IEEE International Electron Devices Meeting - IEDM
Title
Novel junction design for NMOS Si bulk-FinFETs with extension doping by phosphorus doped silicate glass
Publication type
Meeting abstract
Embargo date
9999-12-31
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