Novel junction design for NMOS Si bulk-FinFETs with extension doping by phosphorus doped silicate glass

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Author(s)

Sasaki, Yuichiro

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Ritzenthaler, Romain

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De Roest, David

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De Keersgieter, An

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Kubicek, Stefan

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Kikuchi, Yoshiaki

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Demuynck, Steven

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Veloso, Anabela

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Vandervorst, Wilfried

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Horiguchi, Naoto

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Metrics

1959 since deposited on 2021-10-22

Acq. date: 2025-10-22