Publication:

Novel junction design for NMOS Si bulk-FinFETs with extension doping by phosphorus doped silicate glass

Date

2015

Meeting abstract

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Files

33079.pdf 2.69 MB

Author(s)

Sasaki, Yuichiro

;

Ritzenthaler, Romain

;

;

De Roest, David

;

;

De Keersgieter, An

;

;

;

Kubicek, Stefan

;

;

Kikuchi, Yoshiaki

;

Demuynck, Steven

;

Veloso, Anabela

;

Vandervorst, Wilfried

;

Horiguchi, Naoto

;

;

;

Statistics

1965 since deposited on 2021-10-22

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Acq. date: 2026-02-27