Browsing by author "Yamaguchi, Atsuko"
Now showing items 1-4 of 4
-
3D measurement of 3D NAND memory hole with CD-SEM and tilted FIB
Ohashi, Takeyoshi; Yamaguchi, Atsuko; Hasumi, Kazuhisa; Ikota, Masami; Tan, Chi Lim; Raymaekers, Tom; Van den Bosch, Geert; Furnemont, Arnaud; Lorusso, Gian (2017) -
Contact inspection of Si nanowire with SEM voltage contrast
Ohashi, Takeyoshi; Yamaguchi, Atsuko; Hasumi, Kazuhisa; Ikota, Masami; Lorusso, Gian; Horiguchi, Naoto (2018) -
Precise measurement of thin-film thickness in 3D-NAND device with CD-SEM
Ohashi, Takeyoshi; Yamaguchi, Atsuko; Hasumi, Kazuhisa; Ikota, Masami; Lorusso, Gian; Tan, Chi Lim; Van den Bosch, Geert; Furnemont, Arnaud (2018) -
Variability study with CD-SEM metrology for STT-MRAM: correlation analysis between physical dimensions and electrical property of the memory element
Ohashi, Takeyoshi; Yamaguchi, Atsuko; Hasumi, Kazuhisa; Inoue, Osamu; Ikota, Masami; Lorusso, Gian; Donadio, Gabriele Luca; Yasin, Farrukh; Rao, Siddharth; Kar, Gouri Sankar (2017)