Browsing by author "Gillot, Christophe"
Now showing items 1-8 of 8
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Ge CMP process development
Ong, Patrick; Leunissen, Peter; Ansar, Sheik; Gillot, Christophe; Lan, Yongqing; Noller, Bastian; Li, Yuzhuo (2012) -
Ge, III/V Materials CMP
Ong, Patrick; Lan, Yongqing; Noller, Bastian; Gillot, Christophe; Usman Ibrahim, Ansar; Lauter, Michael; Golzarian, Reza; Li, Yuzhuo (2012) -
III-V CMP process development
Ong, Patrick; Ansar, Sheikh; Gillot, Christophe; Lan, Yongqing; Teugels, Lieve; Waldron, Niamh; Proelss, Julian (2013) -
III/V CMP process development
Ong, Patrick; Usman Ibrahim, Ansar; Gillot, Christophe; Lan, Yongqing; Teugels, Lieve; Waldron, Niamh; Proelss, Julian (2013) -
Impact of dummy metal structures on post oxide CMP planarization
Gillot, Christophe; De Backer, E.; Grillaert, Joost; Heylen, Nancy; Vaca, L. M.; Blavier, G. (1999) -
Optimized pore stuffing for enhanced compatibility with interconnect integration flow
de Marneffe, Jean-Francois; Zhang, Liping; Rutigliani, Vito; Noya, G.; Cao, Yi; Lesniewska, Alicja; Varela Pedreira, Olalla; Croes, Kristof; Gillot, Christophe; Tokei, Zsolt; Boemmels, Juergen; Baklanov, Mikhaïl (2015) -
The impact of ALD TaN barrier processes on different BEOL utra low-k dielectrics
Zhang, Xunyuan; Gillot, Christophe; Zhao, Larry; Ryan, Todd; Wu, Chen (2015) -
The impact of PEALD TaN barrier processes on different ultra low-k dielectrics
Zhang, Xunyuan; Gillot, Christophe; Zhao, Larry; Ryan, E. Todd; Wu, Chen (2015)