Browsing by author "Andreas, Michael"
Now showing items 1-9 of 9
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Acoustic cleaning in nano-electronics
Mertens, Paul; Janssens, Tom; Holsteyns, Frank; Zijlstra, Aaldert; Halder, Sandip; Wostyn, Kurt; Andreas, Michael; Hoyer, Ronald; Barbagini, Francesca; Wada, Masayuki; Franklin, Cole; Kim, Tae-Gon; Kim, K; Kenis, Karine; Le, Quoc Toan; Claes, Martine; Kesters, Els; Vos, Rita; Vereecke, Guy; Bearda, Twan; Heyns, Marc (2008) -
Damage cluster analysis of patterned wafers during solvent spray cleaning
Halder, Sandip; Wostyn, Kurt; Andreas, Michael; Wada, Masayuki; Brems, Steven; Bearda, Twan; Pacco, Antoine; Kenis, Karine; Vos, Rita; Mertens, Paul (2009) -
Damage cluster analysis of patterned wafers during solvent spray cleaning
Halder, Sandip; Wostyn, Kurt; Andreas, Michael; Wada, Masayuki; Brems, Steven; Bearda, Twan; Pacco, Antoine; Kenis, Karine; Mertens, Paul; Vos, Rita (2009) -
High velocity aerosol cleaning with organic solvents: particle removal and substrate damage
Andreas, Michael; Wostyn, Kurt; Wada, Masayuki; Janssens, Tom; Kenis, Karine; Bearda, Twan; Mertens, Paul (2008) -
High velocity aerosol cleaning with organic solvents: particle removal and substrate damage
Andreas, Michael; Wostyn, Kurt; Wada, Masayuki; Janssens, Tom; Kenis, Karine; Bearda, Twan; Mertens, Paul (2009) -
Particle removal efficiency and damage analysis on silicon wafers after megasonic cleaning in solvents
Barbagini, Francesca; Halder, Sandip; Janssens, Tom; Kenis, Karine; Wostyn, Kurt; Bearda, Twan; Le, Quoc Toan; Leunissen, Peter; Mertens, Paul; Kim, Kyung Hyun; Andreas, Michael (2009) -
Roadblocks and critical aspects for sub 45 nm wafer cleaning and possible solutions
Mertens, Paul; Vos, Rita; Vereecke, Guy; Janssens, Tom; Wostyn, Kurt; Claes, Martine; Kesters, Els; Le, Quoc Toan; Halder, Sandip; Hoyer, Ronald; Andreas, Michael; Kim, Kyung Hyun; Barbagini, Francesca; Zijlstra, Aaldert; Holsteyns, Frank; Kim, Tae-Gon; Kenis, Karine; Arnauts, Sophia; Lux, Marcel; Bearda, Twan; Heyns, Marc (2008) -
Spray systems for cleaning during semiconductor manufacturing
Wostyn, Kurt; Wada, Masayuki; Sano, Ken-Ichi; Andreas, Michael; Janssens, Tom; Bearda, Twan; Leunissen, Peter; Mertens, Paul (2008) -
Tackling the challenges of physical cleaning
Wostyn, Kurt; Janssens, Tom; Zijlstra, Aaldert; Wada, Masayuki; Andreas, Michael; Kim, Tae-Gon; Bearda, Twan; Leunissen, Peter; Park, Jin-Goo; Mertens, Paul (2008)