Browsing by author "de Backer, E."
Now showing items 1-4 of 4
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Antenna test structure matrix description, application for optimized HDP oxide deposition, metal etch, Ar preclean and passivation processing in sub-half micron CMOS processing
Ackaert, J.; de Backer, E.; Coppens, P.; Creusen, Martin (1999) -
Correlation between hot carrier stress, oxide breakdown and gate leakage current for monitoring plasma processing induced damage on gate oxide
Zhichun, Wang; Ackaert, J.; Salm, C.; de Backer, E.; Van den Bosch, Geert; Zawalski, Wade (2002) -
Wafer bevel protection during deep reactive ion etching
Charavel, Remy; Gassot, Pierre; de Backer, E.; Altamirano Sanchez, Efrain; Van Aelst, Joke; Devriendt, Katia; Van Wichelen, Koen (2010) -
Water-assisted positive ion contamination resulting in charge loss in nonvolatile memories
Gassot, P.; Iline, A.; de Backer, E.; Tack, Marnix; Wellekens, Dirk; Van Houdt, Jan; Haspeslagh, Luc (2000)