Browsing by author "Feurprier, Yannick"
Now showing items 1-3 of 3
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Approaches to Enable Patterning of Tight Pitches towards High NA EUV
Tadatomo, Hiroki; Dauendorffer, Arnaud; Onitsuka, Tomoya; Genjima, Hisashi; Ido, Yasuyuki; Okada, Soichiro; Kuwahara, Yuhei; Hara, Arisa; Dinh, Congque; Fujimoto, Seiji; Kawakami, Shinichiro; Muramatsu, Makoto; Shimura, Satoru; Nafus, Kathleen; Oikawa, Noriaki; Ono, Kenta; Feurprier, Yannick; Demand, Marc; Negreira, Ainhoa Romo; Nagahara, Seiji; Blanco, Victor; Foubert, Philippe; De Simone, Danilo (2022) -
Mitigation of the etch-induced intra-field overlay contribution
van Haren, Richard; Yildirim, Oktay; Mouraille, Orion; van Dijk, Leon; Kumar, Kaushik; Feurprier, Yannick; Jehoul, Christiane; Hermans, Jan (2022) -
Novel processing technologies for advanced EUV patterning materials using metal oxide resist (MOR)
Onitsuka, Tomoya; Kawakami, Shinichiro; Dauendorffer, Arnaud; Shimura, Satoru; Nafus, Kathleen; Feurprier, Yannick; Foubert, Philippe; De Simone, Danilo (2021)